subm - surf
- submicrometer channel length MOSFET
- submicrometer dimension
- submicrometer geometry
- submicrometer processing
- submicrometer resolution
- submicrometer structure
- submicrometer-wide emitter
- submicron (IC) technolog/y
- submicron (IC) technolog/y
- submicron (mask) aligner
- submicron (mask) aligner
- submicron channel width
- submicron geometry
- submicron integrated circuit
- submicron level
- submicron lithography
- submicron processing ї
- submicron slot
- submicron-scale MOS device
- subminiaturization
- subnanosecond integrated circuit
- subnanosecond performance
- subnanosecond technolog/y
- substance
- substitution atom
- substitution imperfection
- substitution reaction
- substitutional defect
- substitutional diffusion
- substitutional doping
- substitutional impurity
- substrate
- substrate carrier
- substrate contact
- substrate damages
- substrate desiccant
- substrate diffusion
- substrate film
- substrate holder
- substrate layer
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